Product Introduction:
HDM-K series ultra-high vacuum diffusion pump oil is a kind of ultra-high vacuum pump oil, which is based on the deeply refined top-grade mineral oil and prcessed by vacuum molecular distillation, aluminum silicate adsorption and film degassing.HDM-K series ultra-high vacuum diffusion pump oil has extremely low saturated vapor pressure, high pumping speed and extremely high thermal oxidation stability.
Performance characteristics:
High purity: highly pure components to ensure high purity in vacuum environment.
High-temperature stability: it can maintain stability at high temperature and run at higher temperature, which is helpful to improve the pumping speed of the pump.
Good fluidity: low viscosity and high fluidity help improve the pumping efficiency and performance of the pump.
Very high extreme vacuum and good pumping speed.
Application scope:
HDM-K series ultra-high vacuum diffusion pump oil is used for vacuum treatment in semiconductor manufacturing prcess, such as cleaning, annealing, deposition and etching.
HDM-K series ultra-high vacuum diffusion pump oil is used in vacuum packaging, vacuum drying, vacuum arc welding, vacuum electron beam welding and other fields.
HDM-K series ultra-high vacuum diffusion pump oil is used in vacuum heat treatment, vacuum coating, vacuum impregnation and other vacuum treatment prcesses.
Technical specifications:
- Q/320581GVZ003-2018 same
Typical data:
|
Item |
HDM-k ultra-high vacuum diffusion pump oil |
Test Method |
|
|---|---|---|---|
|
Model |
SK |
K4 |
|
|
Kinematic viscosity (40℃), mm2/s |
41.4~50.6 |
90~110 |
GB/T265 ASTM D445 |
|
Flash point (opening),℃ ≥ |
230 |
250 |
GB/T3536 ASTM D92 |
|
Pour point,℃ ≤ |
-25 |
-15 |
GB/T3535 ASTM D97 |
|
moisture |
None |
None |
GB/T260 ASTM D95 |
|
Viscosity index ≥ |
100 |
100 |
GB/T2541 ASTM D2270 |
|
Acid value koh,g/mg ≤ |
0.1 |
0.1 |
GB/T5530 ASTM D664 |
|
Anti-emulsification, (40-40-0), min ≤ |
10 |
15 |
GB/T7305 ASTM D1401 |
|
Mechanical impurities,% |
None |
None |
GB/T511 ASTM D4378 |
|
Ultimate vacuum, kpa ≤ |
5.0×10-7
|
5.0×10-7
|
GB/T6306.2
|
Note: the above data are the measurement results of representative styles, and the product performance is subject to the actual measurement.
Caution:
According to the equipment oil regulations, select the oil with appropriate quality grade and viscosity grade; The storage container must be dedicated, and it must be waterproof, moisture-proof and prevent mechanical impurities from mixing during storage and transportation; Prevent foreign body pollution; To prevent mixing with other oils, different types of lubricating oil shall not be mixed.
Packing: 200L iron drum and 18L plastic drum.
